Linear / XY Stage
Ultra-compact, high-precision linear and XY stages driven by TULA ultrasonic motors. A lineup of 15 models spanning standard single- and dual-axis types, cross roller guide, linear guide, and hollow types. Resolution down to 0.1μm with power-off holding.
Features
- Resolution selectable from 0.1/0.5/1.0/5.0μm
- Repeatability ±3 pulse (±0.5 pulse on high-precision types)
- Self-locking hold without power
- 15 models: single/dual axis, cross roller and hollow types
X-Axis Stage (Standard)
Standard single-axis linear stages driven by two TULA35/50/70 actuators. Resolution is selectable from 0.1/0.5/1.0/5.0μm; repeatability is ±5 pulse when 0.1μm is selected.
XDT35-045
XDT50-045
XDT70-105
XDT70-155
X-Axis Stage
| Model | XDT35-045 | XDT50-045 | XDT70-105 | XDT70-155 |
|---|---|---|---|---|
| Stroke | 4mm | 4mm | 10mm | 15mm |
| Resolution | 1.0μm | 1.0μm | 1.0μm | 1.0μm |
| Selectable resolution | — | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm |
| Repeatability | ±3 pulse | ±3 pulse | ±3 pulse | ±3 pulse |
| Thrust | 40gf | 70gf | 70gf | 60gf |
| Holding force | 150gf | 300gf | 300gf | 300gf |
| Weight | Approx. 8 g | Approx. 11 g | Approx. 13 g | Approx. 14 g |
| Table size | 18×22mm | 22×26mm | 22×26mm | 22×26mm |
| Drive actuator | TULA35 × 2 | TULA50 × 2 | TULA70 × 2 | TULA70 × 2 |
X-Axis Cross Roller Guide Stage
Single-axis stages using cross roller guides for higher rigidity and straightness, with a larger table and greater thrust than the standard type.
XCWT70-105
XCWT70-155
X-Axis Cross Roller Guide Stage
| Model | XCWT70-105 | XCWT70-155 |
|---|---|---|
| Guide type | Cross roller guide | Cross roller guide |
| Stroke | 10mm | 15mm |
| Resolution | 1.0μm | 1.0μm |
| Selectable resolution | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm |
| Repeatability | ±3 pulse | ±3 pulse |
| Thrust | 80gf | 70gf |
| Holding force | 350gf | 350gf |
| Weight | Approx. 30 g | Approx. 40 g |
| Table size | 20×32mm | 20×42mm |
| Drive actuator | TULA70 × 2 | TULA70 × 2 |
X-Axis Cross Roller Guide Stage (TULA70W)
A long-stroke configuration (±12.5mm) combining one large TULA70W actuator with two cross roller guides, equipped with an ABZ-phase encoder.
XCTW70-255
X-Axis Cross Roller Guide Stage
| Model | XCTW70-255 |
|---|---|
| Guide type | Cross roller guide × 2 |
| Stroke | ±12.5mm |
| Resolution | 1.0μm/pulse (ABZ phase) |
| Selectable resolution | 1.0 / 5.0μm |
| Repeatability | ±3 pulse |
| Thrust | 50gf |
| Holding force | 300gf |
| Weight | Approx. 70 g |
| Table size | 31×50mm |
| Drive actuator | TULA70W × 1 |
X-Axis Linear Guide / Mini Stage
High-precision types with a standard 0.1μm/pulse ABZ-phase encoder achieving ±0.5 pulse repeatability. Repeatability is ±3 pulse when 0.5/1.0/5.0μm is selected. The XMDT50-057 is an ultra-compact model weighing approx. 5 g.
XLGT70-157
XMDT50-057
X-Axis Linear Guide / Mini Stage
| Model | XLGT70-157 | XMDT50-057 |
|---|---|---|
| Guide type | Linear guide × 1 | — |
| Stroke | ±7.5mm | ±2.5mm |
| Resolution | 0.1μm/pulse (ABZ phase) | 0.1μm/pulse (ABZ phase) |
| Selectable resolution | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm |
| Repeatability | ±0.5 pulse | ±0.5 pulse |
| Thrust | 70gf | 60gf |
| Holding force | 300〜350gf | 300〜350gf |
| Weight | Approx. 23 g | Approx. 5 g |
| Table size | 30×31mm | 8×13mm |
| Drive actuator | TULA70 × 2 | TULA50 × 2 |
XY-Axis Stage (Standard)
Two-axis configuration stacking two X-axis stages. Four actuators allow the X and Y axes to be controlled independently. Resolution is selectable from 0.1/0.5/1.0/5.0μm.
XYDT50-045
XYDT70-105
XYDT70-155
XY-Axis Stage
| Model | XYDT50-045 | XYDT70-105 | XYDT70-155 |
|---|---|---|---|
| Stroke | 4mm | 10mm | 15mm |
| Resolution | 1.0μm | 1.0μm | 1.0μm |
| Selectable resolution | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm |
| Repeatability | ±3 pulse | ±3 pulse | ±3 pulse |
| Thrust | 60gf | 60gf | 50gf |
| Holding force | 250gf | 250gf | 250gf |
| Weight | Approx. 22 g | Approx. 26 g | Approx. 28 g |
| Table size | 22×26mm | 22×26mm | 22×26mm |
| Drive actuator | TULA50 × 4 | TULA70 × 4 | TULA70 × 4 |
XY-Axis Cross Roller Guide Stage
Two-axis stages with cross roller guides, offering higher rigidity and thrust than the standard type for positioning heavier payloads.
XYCWT70-105
XYCWT70-155
XY-Axis Cross Roller Guide Stage
| Model | XYCWT70-105 | XYCWT70-155 |
|---|---|---|
| Guide type | Cross roller guide | Cross roller guide |
| Stroke | 10mm | 15mm |
| Resolution | 1.0μm | 1.0μm |
| Selectable resolution | 0.1 / 0.5 / 1.0 / 5.0μm | 0.1 / 0.5 / 1.0 / 5.0μm |
| Repeatability | ±3 pulse | ±3 pulse |
| Thrust | 80gf | 70gf |
| Holding force | 350gf | 350gf |
| Weight | Approx. 60 g | Approx. 80 g |
| Table size | 20×32mm | 20×42mm |
| Drive actuator | TULA70 × 4 | TULA70 × 4 |
XY-Axis Hollow Stage
A two-axis stage with a φ23 effective hollow aperture at the center of the table, suited to optical systems requiring bottom illumination, observation, or routing of beams and tubing.
XYHDT50-045
XY-Axis Hollow Stage
| Model | XYHDT50-045 |
|---|---|
| Stroke | 4mm |
| Resolution | 1.0μm |
| Selectable resolution | 0.1 / 0.5 / 1.0 / 5.0μm |
| Repeatability | ±3 pulse |
| Thrust | 60gf |
| Holding force | 250gf |
| Weight | Approx. 44 g |
| Table size | 47×50mm |
| Effective hollow diameter | φ23 |
| Drive actuator | TULA50 × 4 |