Linear / XY Stage

Ultra-compact, high-precision linear and XY stages driven by TULA ultrasonic motors. A lineup of 15 models spanning standard single- and dual-axis types, cross roller guide, linear guide, and hollow types. Resolution down to 0.1μm with power-off holding.

Features

  • Resolution selectable from 0.1/0.5/1.0/5.0μm
  • Repeatability ±3 pulse (±0.5 pulse on high-precision types)
  • Self-locking hold without power
  • 15 models: single/dual axis, cross roller and hollow types

X-Axis Stage (Standard)

Standard single-axis linear stages driven by two TULA35/50/70 actuators. Resolution is selectable from 0.1/0.5/1.0/5.0μm; repeatability is ±5 pulse when 0.1μm is selected.

XDT35-045

XDT35-045

XDT50-045

XDT50-045

XDT70-105

XDT70-105

XDT70-155

XDT70-155

X-Axis Stage

Model XDT35-045 XDT50-045 XDT70-105 XDT70-155
Stroke 4mm 4mm 10mm 15mm
Resolution 1.0μm 1.0μm 1.0μm 1.0μm
Selectable resolution 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm
Repeatability ±3 pulse ±3 pulse ±3 pulse ±3 pulse
Thrust 40gf 70gf 70gf 60gf
Holding force 150gf 300gf 300gf 300gf
Weight Approx. 8 g Approx. 11 g Approx. 13 g Approx. 14 g
Table size 18×22mm 22×26mm 22×26mm 22×26mm
Drive actuator TULA35 × 2 TULA50 × 2 TULA70 × 2 TULA70 × 2

X-Axis Cross Roller Guide Stage

Single-axis stages using cross roller guides for higher rigidity and straightness, with a larger table and greater thrust than the standard type.

XCWT70-105

XCWT70-105

XCWT70-155

XCWT70-155

X-Axis Cross Roller Guide Stage

Model XCWT70-105 XCWT70-155
Guide type Cross roller guide Cross roller guide
Stroke 10mm 15mm
Resolution 1.0μm 1.0μm
Selectable resolution 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm
Repeatability ±3 pulse ±3 pulse
Thrust 80gf 70gf
Holding force 350gf 350gf
Weight Approx. 30 g Approx. 40 g
Table size 20×32mm 20×42mm
Drive actuator TULA70 × 2 TULA70 × 2

X-Axis Cross Roller Guide Stage (TULA70W)

A long-stroke configuration (±12.5mm) combining one large TULA70W actuator with two cross roller guides, equipped with an ABZ-phase encoder.

XCTW70-255

XCTW70-255

X-Axis Cross Roller Guide Stage

Model XCTW70-255
Guide type Cross roller guide × 2
Stroke ±12.5mm
Resolution 1.0μm/pulse (ABZ phase)
Selectable resolution 1.0 / 5.0μm
Repeatability ±3 pulse
Thrust 50gf
Holding force 300gf
Weight Approx. 70 g
Table size 31×50mm
Drive actuator TULA70W × 1

X-Axis Linear Guide / Mini Stage

High-precision types with a standard 0.1μm/pulse ABZ-phase encoder achieving ±0.5 pulse repeatability. Repeatability is ±3 pulse when 0.5/1.0/5.0μm is selected. The XMDT50-057 is an ultra-compact model weighing approx. 5 g.

XLGT70-157

XLGT70-157

XMDT50-057

XMDT50-057

X-Axis Linear Guide / Mini Stage

Model XLGT70-157 XMDT50-057
Guide type Linear guide × 1
Stroke ±7.5mm ±2.5mm
Resolution 0.1μm/pulse (ABZ phase) 0.1μm/pulse (ABZ phase)
Selectable resolution 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm
Repeatability ±0.5 pulse ±0.5 pulse
Thrust 70gf 60gf
Holding force 300〜350gf 300〜350gf
Weight Approx. 23 g Approx. 5 g
Table size 30×31mm 8×13mm
Drive actuator TULA70 × 2 TULA50 × 2

XY-Axis Stage (Standard)

Two-axis configuration stacking two X-axis stages. Four actuators allow the X and Y axes to be controlled independently. Resolution is selectable from 0.1/0.5/1.0/5.0μm.

XYDT50-045

XYDT50-045

XYDT70-105

XYDT70-105

XYDT70-155

XYDT70-155

XY-Axis Stage

Model XYDT50-045 XYDT70-105 XYDT70-155
Stroke 4mm 10mm 15mm
Resolution 1.0μm 1.0μm 1.0μm
Selectable resolution 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm
Repeatability ±3 pulse ±3 pulse ±3 pulse
Thrust 60gf 60gf 50gf
Holding force 250gf 250gf 250gf
Weight Approx. 22 g Approx. 26 g Approx. 28 g
Table size 22×26mm 22×26mm 22×26mm
Drive actuator TULA50 × 4 TULA70 × 4 TULA70 × 4

XY-Axis Cross Roller Guide Stage

Two-axis stages with cross roller guides, offering higher rigidity and thrust than the standard type for positioning heavier payloads.

XYCWT70-105

XYCWT70-105

XYCWT70-155

XYCWT70-155

XY-Axis Cross Roller Guide Stage

Model XYCWT70-105 XYCWT70-155
Guide type Cross roller guide Cross roller guide
Stroke 10mm 15mm
Resolution 1.0μm 1.0μm
Selectable resolution 0.1 / 0.5 / 1.0 / 5.0μm 0.1 / 0.5 / 1.0 / 5.0μm
Repeatability ±3 pulse ±3 pulse
Thrust 80gf 70gf
Holding force 350gf 350gf
Weight Approx. 60 g Approx. 80 g
Table size 20×32mm 20×42mm
Drive actuator TULA70 × 4 TULA70 × 4

XY-Axis Hollow Stage

A two-axis stage with a φ23 effective hollow aperture at the center of the table, suited to optical systems requiring bottom illumination, observation, or routing of beams and tubing.

XYHDT50-045

XYHDT50-045

XY-Axis Hollow Stage

Model XYHDT50-045
Stroke 4mm
Resolution 1.0μm
Selectable resolution 0.1 / 0.5 / 1.0 / 5.0μm
Repeatability ±3 pulse
Thrust 60gf
Holding force 250gf
Weight Approx. 44 g
Table size 47×50mm
Effective hollow diameter φ23
Drive actuator TULA50 × 4