LM Stage (Coil-moving)
Stage with short-coil, high-thrust linear motor. Direct-drive structure with no backlash, high rigidity, and high precision. Proprietary linear motor mechanism achieves max acceleration 8G, max speed 5m/sec. Stroke up to 5m available.
Features
- Max acceleration 8G, max speed 5m/sec
- Backlash-free, high rigidity
- Clean room compatible
- Max stroke 5m
SGL Series (Single-Guide Linear Motor Stage)
Compact single-guide linear motor stage ideal for transport of small workpieces. Direct-drive structure delivers backlash-free, high-rigidity motion.
SGL Series Specifications
Spec PDF| Specification | SGL80 | SGL100 | SGL120 |
|---|---|---|---|
| Mounted motor | AUM2 | AUM3 | AUM4 |
| Coil size | S2 / S3 / S4 | S2 / S3 / S4 | S2 / S3 / S4 |
| Effective stroke (mm) | 200～1200 | 200～1200 | 200～1200 |
| Max acceleration (G) | 10 | 10 | 10 |
| Max speed (m/s) | 5 | 5 | 5 |
| Straightness (μm) | ±3/25mm | ±3/25mm | ±3/25mm |
| Flatness (μm) | ±3/25mm | ±3/25mm | ±3/25mm |
| Repeatability @1 μm resolution (μm) | ±3 | ±3 | ±3 |
| Repeatability @0.5 μm resolution (μm) | ±1.5 | ±1.5 | ±1.5 |
| Repeatability @0.1 μm resolution (μm) | ±1 | ±1 | ±1 |
| Max bearing load (N) | 2480 | 3944 | 9360 |
| Guide | Single-size 15 | Single-size 15 | Single-size 15 |
DGL Series (Double-Guide Linear Motor Stage)
Double-guide linear motor stage for higher loads. Coreless design provides smooth, ripple-free speed control. Strokes up to 5 m available; clean-room specification supported.
DGL Series Specifications
Spec PDF| Specification | DGL150 | DGL180 | DGL200 | DGL250 |
|---|---|---|---|---|
| Mounted motor (coreless) | AUM2 | AUM3 | AUM4 | AUM5 |
| Mounted motor (iron-core) | ACM1-S30/L30～S80/L80 | ACM1-S50/L50, ACM2 | ACM1-S80/L80～S100/L100, ACM3 | ACM4 |
| Effective stroke (mm) | 100～1200 | 100～1200 | 100～1200 | 100～1200 |
| Max acceleration (G) | 10 | 10 | 10 | 10 |
| Max speed (m/s) | 5 | 5 | 5 | 5 |
| Straightness (μm) | ±3/25mm | ±3/25mm | ±3/25mm | ±3/25mm |
| Flatness (μm) | ±3/25mm | ±3/25mm | ±3/25mm | ±3/25mm |
| Repeatability @1 μm resolution (μm) | ±3 | ±3 | ±3 | ±3 |
| Repeatability @0.1 μm resolution (μm) | ±1 | ±1 | ±1 | ±1 |
| Guide | Dual-size 12/15 | Dual-size 15 | Dual-size 15/20 | Dual-size 20 |
| Cover option | S / C / CR / B | S / C / CR / B | S / C / CR / B | S / C / CR / B |